发明名称 Multilayer ceramic piezoelectric laminates with zinc oxide conductors
摘要 A modification of the traditional unimorph flextensional actuator is provided by replacing the metal shim with an electrically conducting oxide. Comprised of lead zirconate titanate and zinc oxide that is co-sintered, the laminate composite obtains large axial displacements while maintaining moderate axial loads. The varistor properties of zinc oxide dictate that the conductance increases several orders of magnitude when a critical electric field is applied. The versatility of the processing over other actuator system facilitates miniaturization, while maintaining comparable performance characteristics. Functional gradients in the material properties are created in the green body by layering thin tape cast sheets. The unique PZT-zinc oxide composite not only controls the piezoelectric gradient, but permits control of the sintering kinetics leading to the processing of either flat or highly domed structures.
申请公布号 US6329741(B1) 申请公布日期 2001.12.11
申请号 US19990302758 申请日期 1999.04.30
申请人 THE TRUSTEES OF PRINCETON UNIVERSITY 发明人 VARTULI JAMES S.;MILIUS DAVID L.;LI XIAOPING;SHIH WEI H.;SHIH WAN Y.;PRUD'HOMME ROBERT K.;AKSAY ILHAN A.
分类号 H01L41/047;H01L41/09;(IPC1-7):H01L41/08 主分类号 H01L41/047
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