发明名称 |
Architecture and method of coupling electromagnetic energy to thermal detectors |
摘要 |
A radiation sensor. The inventive sensor has a two-level detector structure formed on a substrate in which a thermal detector element is suspended over the substrate as a microbridge structure. A receiver of electromagnetic radiation is provided on the same side of the substrate in a manner that efficiently couples the radiation field to the thermal detector element. The thermal detector element has a sandwich structure including a heater metal layer, a dielectric layer, and a thin film thermo-resistive material. The thermal detector element is suspended out of physical contact with the receiver. In one embodiment, the receiver is an antenna having a crossed bowtie configuration that efficiently couples the radiation field to the detector element. The inventive radiation sensors are especially useful for mm-wave and microwave sensing applications. The sensor can be used individually or in linear or two-dimensional arrays thereof. The invention also is directed to a method of fabricating such a radiation sensor.
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申请公布号 |
US6329655(B1) |
申请公布日期 |
2001.12.11 |
申请号 |
US19990414989 |
申请日期 |
1999.10.07 |
申请人 |
RAYTHEON COMPANY |
发明人 |
JACK MICHAEL D.;RAY MICHAEL;VARESI JOHN;GRINBERG JAN;FETTERMAN HAROLD;DOLEZAL FRANKLIN A. |
分类号 |
G01J5/20;H01Q1/22;H01Q9/28;H01Q21/24;(IPC1-7):G01J5/00 |
主分类号 |
G01J5/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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