发明名称 |
Manufacture of field emission device |
摘要 |
A method of manufacturing a field emission device. The method having the steps of preparing a field emitter array having a plurality of electron emitting elements made of conductive material capable of emitting electrons upon application of an electric field, and impinging particle beams upon the plurality of electron emitting elements at the same time to mill a tip of each electron emitting element and form a sharp tip.
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申请公布号 |
US6329214(B1) |
申请公布日期 |
2001.12.11 |
申请号 |
US19980146545 |
申请日期 |
1998.09.03 |
申请人 |
YAMAHA CORPORATION |
发明人 |
HATTORI ATSUO;MIYAZAWA KENICHI |
分类号 |
H01J9/02;H01L29/66;(IPC1-7):H01L21/00 |
主分类号 |
H01J9/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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