发明名称 |
Method and system for recovering and recirculating a deuterium-containing gas |
摘要 |
Provided is a novel method of and system for recovering and recirculating a deuterium-containing gas. According to the inventive method, a deuterium-containing feed gas is introduced into a chamber. An exhaust gas containing deuterium is removed from the chamber. The deuterium concentration of the exhaust gas is adjusted to a predetermined value, thereby producing a concentration-adjusted gas stream. Finally, the concentration-adjusted gas stream is introduced into the chamber as the deuterium-containing feed gas. The invention makes the use of deuterium, for example, in the mass production of semiconductor devices, commercially feasible.
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申请公布号 |
US6328801(B1) |
申请公布日期 |
2001.12.11 |
申请号 |
US19980019781 |
申请日期 |
1998.02.06 |
申请人 |
L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE |
发明人 |
GARY DANIEL;GIRARD JEAN-MARC;ROSTAING JEAN-CHRISTOPHE;FRIEDT JEAN-MARIE |
分类号 |
B01D53/04;(IPC1-7):B05C11/00;H01L21/22;H01L21/265;B01D53/02;B01J8/00 |
主分类号 |
B01D53/04 |
代理机构 |
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主权项 |
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地址 |
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