LIQUID JET HEAD AND ITS MANUFACTURING METHOD, INK JET RECORDER AND MICROACTUATOR

摘要

PROBLEM TO BE SOLVED: To provide an electrostatic ink jet head and a microactuator for ejecting an ink drop by deforming a diaphragm forming the wall face of a liquid chamber with an electrostatic force generated between the diaphragm and an electrode thereby varying the volume/pressure in the liquid chamber in which high image quality recording can be realized at a low cost by forming a micro liquid chamber with high accuracy at a low cost. SOLUTION: A through hole 36 serving as a liquid chamber is made in a glass substrate 31 by sandblasting.