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发明名称
摘要
申请公布号	JP2001525933(A)	申请公布日期	2001.12.11
申请号	JP19980549885	申请日期	1998.05.11
申请人		发明人
分类号	G01T1/36;G01T3/08;H01L31/09;(IPC1-7):G01T3/08	主分类号	G01T1/36
代理机构		代理人
主权项
地址

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