摘要 |
PROBLEM TO BE SOLVED: To provide a method of restraining and analyzing difference of detection efficiencies in a secondary electron multiplier tube, in the case of analyzing elements by mass-separating plural kinds of ions, specifying the mass number, and detecting the ions by the secondary electron multiplier tube. SOLUTION: The mass spectroscope 1 is provided with a mass separation mechanism 5 for separating by mass a given ion, and a secondary electron multiplier tube 7 for detecting the ion separated by the mass separation mechanism 5. An ion velocity modulation mechanism 3 is provided for modulating velocity of ion between the mass separation mechanism 5 and the secondary electron multiplier tube 7.
|