发明名称 MASS SPECTOSCOPE AND MASS SPECTOROMETRY
摘要 PROBLEM TO BE SOLVED: To provide a method of restraining and analyzing difference of detection efficiencies in a secondary electron multiplier tube, in the case of analyzing elements by mass-separating plural kinds of ions, specifying the mass number, and detecting the ions by the secondary electron multiplier tube. SOLUTION: The mass spectroscope 1 is provided with a mass separation mechanism 5 for separating by mass a given ion, and a secondary electron multiplier tube 7 for detecting the ion separated by the mass separation mechanism 5. An ion velocity modulation mechanism 3 is provided for modulating velocity of ion between the mass separation mechanism 5 and the secondary electron multiplier tube 7.
申请公布号 JP2001338604(A) 申请公布日期 2001.12.07
申请号 JP20000158484 申请日期 2000.05.29
申请人 NEC CORP 发明人 KAWASHIMA YOSHIYA
分类号 G01N27/62;H01J49/06;H01J49/26;H01L21/66;(IPC1-7):H01J49/06 主分类号 G01N27/62
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