发明名称 |
INSPECTION APPARATUS |
摘要 |
PROBLEM TO BE SOLVED: To enable detecting adhesion of an unnecessary electrode formation substance to a specimen. SOLUTION: A first and a second cameras 9 and 10 are set in a reflection direction of light from the specimen 1, and at the same time a filter 11 is set on the side of a light-receiving face of the first camera 9.
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申请公布号 |
JP2001337049(A) |
申请公布日期 |
2001.12.07 |
申请号 |
JP20000156343 |
申请日期 |
2000.05.26 |
申请人 |
MATSUSHITA ELECTRIC IND CO LTD |
发明人 |
KATO KENICHI;SHIBUYA KIYOSHI |
分类号 |
G01B11/30;G01N21/956;(IPC1-7):G01N21/956 |
主分类号 |
G01B11/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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