| 摘要 |
PROBLEM TO BE SOLVED: To provide in a piezoelectric actuator consisting of a vibrator and a mover an inspection method for the piezoelectric actuator which simply and easily inspects only the characteristic of the vibrator. SOLUTION: A vibrator 33 is set in an alignment plate 11. First the alignment plate 11 is carried to an inspection stage by a positioning pin 13a which operates up and down or from side to side. Then a mover 15 is set in the vibrator 33 by operating a rotary inspection unit downward. The mover 15 is pressurized at a predetermined pressure by a pressurizing jig 16. An excitation signal at a predetermined voltage is applied to probes 14a, 14b for energizing. When the mover 15 rotates, the rotating speed is detected at every moment when a mark 15a passes a photosensor 17. A rotary inspection unit 22 and the probes 14a, 14b are operated up and down and removed from the vibrator 33. Finally the alignment plate 11 is conveyed up to a discharge stage by the positioning pin 13a which operates up and down or from side to side. |
