| 摘要 |
PROBLEM TO BE SOLVED: To provide a fine particle measuring instrument wherein the acceleration of breakdown is achieved. SOLUTION: A fine particle component analyzer is equipped with a means for introducing fine particles into a cell, a means for irradiating the fine particles in the cell with laser beam, a transmission means for transmitting beam from fine particles broken down by the irradiation with laser beam, a spectral diffraction means for spectrally diffracting the beam transmitted by the transmission means, and a photodetector for detecting sprectrally diffracted beam and analyzing the size or component of the fine particles. A means for introducing assist gas into the cell is provided to accelerate the breakdown of the fine particles.
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