| 摘要 |
PROBLEM TO BE SOLVED: To provide a defect-inspection apparatus and a defect inspection method whereby the apparatus can be made compact and inspection can be sped up. SOLUTION: To this defect-inspection apparatus are set a line sensor 4 with sensor elements arranged for detecting a concentration level of an object 1 to be inspected, a moving device for moving the line sensor or the object in a direction intersecting a direction in which the sensor elements of the line sensor are arranged, a threshold storage device 8 for storing one threshold value for each pixel, a binarization circuit 6 for binarizing the concentration level with the use of threshold values, a run length device 7 for holding the concentration level only when binary data have a predetermined value and generating one-dimensional defect information from the held concentration level, and a link process device 9 for linking each of the one-dimensional defect information and generating two-dimensional defect information. |
