SEMICONDUCTOR ACCELERATION SENSOR

摘要

PROBLEM TO BE SOLVED: To make a temperature characteristic relating to the detection of acceleration hard to deteriorate. SOLUTION: This semiconductor acceleration sensor includes an acceleration sensor chip 1 having a beam-shaped deflecting part 12 extended therefrom, with a weight part 13 supported against the end of the deflecting part 12 by integral molding, the weight part being displaced by acceleration; a first cap 2 joined to one face of the acceleration sensor chip 1 in such a manner as to face the weight part 12; and a second cap 3 having a joining face 32 joined to the other face of the acceleration sensor chip 1 in such a manner as to face the weight part 13 from the side opposite to the first cap 2, with the second cap being supported on a base. The second cap 3 is so formed that a recessed stress-relieving part 33 for relieving stress is provided on the joining face 32 thereof.