发明名称 INTERFEROMETER
摘要 PROBLEM TO BE SOLVED: To provide an interferometer capable of highly precisely realizing measurement of interferogram. SOLUTION: This interferometer comprises an interference loop optical system having a first polarized light beam splitter 6 and a second polarized light beam splitter 7 where light from a light source 1 enters, and also comprises a reflecting mirror 13 reflecting the light emitted from the interference loop optical system. The light entering from the light source 1 is divided into sample beam and reference beam by the first polarized light beam splitter 6 to permeate the sample beam through a sample 11 and put the sample beam together with the reference beam by the second polarized light beam splitter 7. The light put together is reflected by the reflecting mirror 13, and reflected light is divided into the sample beam and the reference beam by the polarized light beam splitter 7 to permeate the sample beam through the sample and put the sample beam together with the reference beam by the first polarized light beam splitter 6 for producing the interferogram.
申请公布号 JP2001336913(A) 申请公布日期 2001.12.07
申请号 JP20000154842 申请日期 2000.05.25
申请人 OLYMPUS OPTICAL CO LTD 发明人 MAKI TAKAO
分类号 G01B9/02;G01J9/02;G02B5/30;(IPC1-7):G01B9/02 主分类号 G01B9/02
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