发明名称 FEEDER
摘要 PROBLEM TO BE SOLVED: To prevent the moment of inertia due to the reaction force received by driving legs and side run-out generated by the moment of inertia, when executing a feeding operation resulting especially from shear deformation, and prevent slippage of the driving legs caused by sudden deformation movement of a shear deformation part, in a feeder, in which a moving element is fed by using the driving legs having an elongation deformation part and the shear deformation part. SOLUTION: The driving legs 21, 22 are fixed on a support block 50, and the support block 50 is fixed on a stainless steel plate 49, extended on a mounting stand 46. The support block 50 is pressed forward by a press spring 55 from the back side, and waveform shaping of a voltage applied on especially the shear deformation part 24 of the driving legs 21, 22 of a driving unit 18 is executed by a waveform-shaping circuit 50, and a rising part is buffered into an S-shape.
申请公布号 JP2001337186(A) 申请公布日期 2001.12.07
申请号 JP20010064047 申请日期 2001.03.07
申请人 TOKYO TECHNOLOGY:KK 发明人 IWABUCHI TETSUYA;UOZUMI KIYOHIKO
分类号 G12B5/00;B23Q5/28;H01L21/68;(IPC1-7):G12B5/00 主分类号 G12B5/00
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