发明名称 DIE BONDING APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide a die bonding apparatus where an electronic component can be implemented on a metal stem automatically. SOLUTION: In a die bonding apparatus 1 for implementing an electronic component S on a metal stem 2, the die bonding apparatus 1 is configured so as to comprise a bonding nozzle 17 for sucking the electronic component S and placing the electronic component S on a component side 27 of the stem 2, a stem mounting head 6 for making the stem 2 mount, a heater part 9 for heating in a state that the electronic component S is arranged on the component side 27 of the stem 2, and an imaging camera 12 that has an optical axis L extending so as to pass through the component side 27 of the stem 2 arranged in the heater part 9 and reciprocate in line with the direction of the optical axis L.
申请公布号 JP2001338935(A) 申请公布日期 2001.12.07
申请号 JP20000157011 申请日期 2000.05.26
申请人 NIDEC COPAL CORP;NIDEC TOSOK CORP 发明人 KAWASHIMA YOSHIYUKI;NITTA HIROSHI;IZUMI MASANORI
分类号 H01L21/52;H01L21/00;(IPC1-7):H01L21/52 主分类号 H01L21/52
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