SUBSTRATE PROCESSING APPARATUS

摘要

PROBLEM TO BE SOLVED: To shorten a forcibly cooling time of a treated boat by a clean air. SOLUTION: A waiting stage 5 for waiting a boat 21A to be treated from this time and a cooling stage 6 for temporarily placing and cooling the treated boat 21B are set to both longitudinal sides of a heat-treating stage 4 in a housing 2 and air outlets 39 of the clean air 35 of a cleaning unit 3 are opposed to both the stages 5 and 6. An exhaust fan 40 for sucking the air 35 and exhausting the air out of the housing 2 is disposed to the stage 5 side. Thus, since the rapid clean air can be blown to the treated boat of the cooling stage, the cooling time of the treated boat can be shortened. Since the clean air contacted with the treated boat is prevented from flowing to the heat-treating stage and the waiting state, the wafers of these stages can be prevented from being contaminated.