发明名称 BOAT STRUCTURE OF DEPOSITION EQUIPMENT
摘要 PURPOSE: To easily changeover control systems of a single valve and a double valve to a single control system in a manifold solenoid valve driven by serial signals. CONSTITUTION: In order to transmit serial signals to solenoid valves through a manifold block 30 connected thereto while mounting a solenoid valve 20, a print substrate is housed in an electric circuit 41 of the manifold block, which substrate has connection terminal 46b, etc., for transmitting the serial signals, a slave chip 47 for sampling an operation signal of the solenoid valve from the serial signal, and an electric supply terminal 49 for carrying current to the solenoid valve 20 based on the operation signal. The slave chip 47 can be switched over between the use for a single valve and a double valve. A switcher 48 therefor is arranged on the manifold block 30. A setter 28 is arranged on the lower surfaces of the single valve and the double valve mounted on the manifold block, for switching the switcher for the respective solenoid valves by mounting the solenoid valve 20.
申请公布号 KR20010006895A 申请公布日期 2001.12.07
申请号 KR20000027932 申请日期 2000.05.24
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