| 摘要 |
PURPOSE: To clean and dry a carrier for a semiconductor efficiently in a short time in an apparatus for cleaning the carrier used, for example, for housing a semiconductor wafer. CONSTITUTION: An organic solvent 4 is supplied to a closed chamber 1 for housing the main body of a carrier for a semiconductor and a door 8 (Fig.(a)). After the main body 7 and the door 8 being cleaned, the solvent 4 is discharged (Fig.(b)). By passing an inactive gas 11 through the chamber 1. the solvent 4 adherent to the main body 7 and the door 8 is dried up (Fig.(c)).
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