| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a PZT crystal film element which has high moisture- resistant properties, high insulation resistance, and a low dielectric loss and is used for an electronic part such as a capacitor, an actuator or the like. SOLUTION: A PZT crystal film of Pb(ZrxTi1-x)O3 (0<=x<=1) is formed through a hydrothermal synthesis method on a substrate, where the hydrophilic part of the PZT crystal film is covered with polymerized or crosslinked adhesive resin, then a thin film electrode is formed on the PZT crystal film and/or the adhesive resin, and the thin film electrode is covered with polymerized or crosslinked adhesive resin. Thus, a PZT crystal film element and its manufacturing method can be obtained.</p> |
