LIGHT SOURCE DEVICE

摘要

PROBLEM TO BE SOLVED: To generate efficiently the light of a wavelength of 200 nm or shorter with a simple constitution. SOLUTION: The light of a single wavelength within the wavelength range from IR region up to visible region generated by a laser generating section is subjected to wavelength conversion to UV light of a wavelength of 200 nm or shorter by a wavelength conversion section 16. The UV light of the prescribed wavelength of <=200 nm is efficiently generated by sum frequency generation using a CBO crystal 46 in the final step of the wavelength conversion as the wavelength conversion section 16 or the intermediate step which is not the final step of the wavelength conversion but generates the UV light of a wavelength of 200 nm or shorter. As a result, the UV light of the wavelength of desired 200 nm or shorter is efficiently generated by a simple constitution.