| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an X-ray lens capable of being used in an X-ray plotting device which does not use an X-ray mask for proximity exposure. SOLUTION: One or more first grooves, extending in the first direction, are formed on a first face of a base material having the mutually parallel first face and second face. A first line of intersection between an imaginary plane, intersecting orthogonally with the first direction and the inner surface of the first groove, forms a projecting curve toward the inside of the base material. One or more second grooves, extending in the second direction intersecting orthogonally with the first direction, are formed on a second face of the base material. A second line of intersection between an imaginary plane, intersecting orthogonally with the second direction and the inner surface of the second groove, forms a projecting curve toward the inside of the base material. The bottom of the first groove and the bottom of the second groove are arranged separately, at a prescribed interval at the intersection spot between the first groove and the second groove.</p> |
