| 摘要 |
PROBLEM TO BE SOLVED: To decide whether data gotten from a measured device are defective or an expectation signal is defective when it is decided that the result of the comparison of the data obtained from the measured device and the expectation signal is defective in an IC tester. SOLUTION: In this IC tester, a quality decision circuit 247 decides the quality and outputs a quality decision signal to a basic control circuit 21 and a fault detection circuit 248. The fault detection circuit 248 receives the quality decision signal, the data gotten from the measured device and the expectation signal as input signals, to detect whether the expectation signal is defective. A controller extracts an output signal detected from the fault detection circuit 248, on the basis of the quality decision signal inputted via the basic control circuit 21, and decides according to the output signal as to whether the data obtained from the measured device defective or the expectation signal is defective.
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