| 摘要 |
PROBLEM TO BE SOLVED: To provide an improved inspection system of an integrated circuit with a lead. SOLUTION: This inspection system for the integrated circuit with the lead comprises a datum 1 having an aperture 2 partitioned by a reference edge 12 and forming a reference plain perpendicular to an optical axis S of the inspection system, an object carrier 30 for positioning an object 10 to be superposed on the aperture 2 of the datum 1, a diffused light source 3 for projecting a contour of the object 10 including the lead 81 and a contour of the reference edge 12 through the aperture 2 to some projecting directions by irradiating with diffused light through the aperture 2, and an optical prism 5 receiving projections of the contours for selecting two projections among the projections received from different projecting directions. Optical path lengths are made to be the same for a first projecting optical path 91 and a second projecting optical path 92 between a contour of light and an image forming surface for one and the other selected projections, respectively.
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