| 摘要 |
PROBLEM TO BE SOLVED: To provide an effective etching method for performing the failure analysis of LSI. SOLUTION: In the failure analysis method of a semiconductor device for a failure cause made by wiring formed on a semiconductor silicon board, a layer insulation film 3 is etched and removed on the semiconductor silicon board by using etching gas (for instance, CHF3) having a high etching selection ratio between a lower layer wire 2 and upper layer wiring 4, and the failure cause (foreign matter 5) is analyzed.
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