发明名称 |
DIE BONDING APPARATUS AND SUCTION NOZZLE FOR DIE BONDING APPARATUS |
摘要 |
PROBLEM TO BE SOLVED: To provide a die bonding apparatus where an electronic component can be implemented on a metal stem automatically, and to provide its suction nozzle. SOLUTION: The suction nozzles 5A, 5B are configured so as to comprise a nozzle body part 60 for sucking a stem base 24 of the stem 2 at their tips and positioning pins 63 that are arranged outside a suction opening 61 provided in the nozzle body part 60 and are protruded from the tips of the nozzle body part 60 so as to insert into a positioning part 25 provided in the stem base 24. |
申请公布号 |
JP2001338934(A) |
申请公布日期 |
2001.12.07 |
申请号 |
JP20000157010 |
申请日期 |
2000.05.26 |
申请人 |
NIDEC COPAL CORP;NIDEC TOSOK CORP |
发明人 |
KAWASHIMA YOSHIYUKI;TAJIMA MAKOTO;IZUMI MASANORI |
分类号 |
H01L21/52;(IPC1-7):H01L21/52 |
主分类号 |
H01L21/52 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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