发明名称 DIE BONDING APPARATUS AND SUCTION NOZZLE FOR DIE BONDING APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide a die bonding apparatus where an electronic component can be implemented on a metal stem automatically, and to provide its suction nozzle. SOLUTION: The suction nozzles 5A, 5B are configured so as to comprise a nozzle body part 60 for sucking a stem base 24 of the stem 2 at their tips and positioning pins 63 that are arranged outside a suction opening 61 provided in the nozzle body part 60 and are protruded from the tips of the nozzle body part 60 so as to insert into a positioning part 25 provided in the stem base 24.
申请公布号 JP2001338934(A) 申请公布日期 2001.12.07
申请号 JP20000157010 申请日期 2000.05.26
申请人 NIDEC COPAL CORP;NIDEC TOSOK CORP 发明人 KAWASHIMA YOSHIYUKI;TAJIMA MAKOTO;IZUMI MASANORI
分类号 H01L21/52;(IPC1-7):H01L21/52 主分类号 H01L21/52
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