ANODIC OXIDIZED AL MATERIAL HAVING EXCELLENT CORROSION RESISTANCE, METHOD FOR MANUFACTURING THE SAME AND AL PARTS FOR PLASMA ATMOSPHERE SAME

摘要

PROBLEM TO BE SOLVED: To provide an anodic oxidized Al material which excellent corrosion resistance is be obtained even under a high-temperature corrosive atmosphere, a method for manufacturing the same and part for a plasma atmosphere using the same. SOLUTION: This anodically oxidized Al-base metallic material is formed with an anodically oxidized film on an Al-base metallic material and is formed by packing the fired bodies of an amorphous Si-containing materials, such as organic compounds containing >=10 at.% Si at >=50% of many cracks formed in the anodically oxidized film and has Si-O bonds. The Al-base metallic base material is manufactured by supplying an organic treating solution prepared by dissolving the organic compounds having the Si-O bonds by an organic solvent to the anodically oxidized film formed on the surface of the Al-base metallic material, then drying the organic treating solution supplied to the anodically oxidized film and firing the organic compounds after the drying at a firing temperature of >=100 deg.C.