| 摘要 |
<p>A support part (20a) supporting an OPM holder (15a) in such a way that the OPM holder (15a) may be perpendicular to the axis of the laser beam is disposed under the OPM holder (15a). A rotary shaft (19) is passed through the support part (20a) and a rotary shaft support part (20b), and thereby the OPM holder (15a) and a DT base (17) is combined. These constitute a rotation support unit (200). The rotation support unit (200) has a degree of freedom of rotation in the direction indicated by the arrow (202). A support bar (21) is attached under an RM holder (15b). A rotary body (22) and a rotary body support part (23) supporting the rotary body (22) is provided on the DT base (17) side to support the support bar (21). These constitute a slider structure (220) slidable along the optical axis. The slider structure (220) has a degree of freedom in the direction indicated by the arrow (222).</p> |
