发明名称 ELECTROLYTIC COPPER PLATING SOLUTIONS
摘要 The present invention provides inter alia copper electroplating compositions, methods for use of the compositions and products formed by the compositions. Electroplating compositions of the invention contain an increased brightener concentration that can provide effective copper plate on difficult-to-plate aperture walls, including high aspect ratio, small diameter microvias.
申请公布号 US2001047943(A1) 申请公布日期 2001.12.06
申请号 US19990313045 申请日期 1999.05.17
申请人 BARSTAD LEON;RYCHWALSKI JAMES;LEFEBVRE MARK;MENARD STEPHANE;MARTIN JAMES;SCHETTY ROBERT;TOBEN MICHAEL 发明人 BARSTAD LEON;RYCHWALSKI JAMES;LEFEBVRE MARK;MENARD STEPHANE;MARTIN JAMES;SCHETTY ROBERT;TOBEN MICHAEL
分类号 C25D3/38;C25D5/48;C25D7/00;C25D7/12;H01L21/288;H05K3/42;(IPC1-7):C25D5/02 主分类号 C25D3/38
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