发明名称 Pretreatment process for a surface texturing process
摘要 Before submitting a sample, including a first material layered upon a substrate, to an ion milling process, whereby a second material is sputtered onto the surface of the first material and the sample is then submitted to an etching process, an irregularity is formed on the surface of the first material. The overall process results in the formation of cones, or micro-tip structures, which may then be layered with a layer of low work function material, such as amorphous diamond. The irregularity in the surface of the first material may be formed by polishing, sandblasting, photolithography, or mechanical means such as scratching.
申请公布号 US2001047931(A1) 申请公布日期 2001.12.06
申请号 US20010778430 申请日期 2001.02.07
申请人 SI DIAMOND TECHNOLOGY, INC. 发明人 XIE CHENGGANG;EICHMAN DEAN JOSEPH
分类号 C23C14/02;C23C14/22;(IPC1-7):C23C14/32;B24B1/00;B44C1/22 主分类号 C23C14/02
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