| 摘要 |
<p>A gas introducing system for temperature control, wherein a gas temperature-controlled for the control of temperature of a processed body is flown through a gas feed line between the placing surface of a placing table for holding the processed body under vacuum and the rear surface of the processed body, and a flow control valve controls a control means based on the measurement pressure in the gas feed line measured with a manometer so as to control the pressure of a gas flow to the gas feed line to a set pressure, whereby a gas pressure can be controlled to a specified value in a short period, waste of gas can be reduced, and the size of the system can be reduced.</p> |
