发明名称 SEMICONDUCTOR WAFER DIAPHRAGM
摘要 A semiconductor wafer diaphragm comprising a non-flat film coupled to a mounting lip is disclosed. The semiconductor wafer diaphragm is useful for reducing the edge fracture of semiconductor wafer die due to sagging of prior art semiconductor wafer tape after a semiconductor wafer adhered thereto is cut. The non-flat film of the semiconductor wafer diaphragm preferably has a surface of a convex shape and is either inherently sticky or has an adhesive layer applied to said surface. The semiconductor wafer diaphragm is used by mounting an uncut semiconductor wafer to the diaphragm in the ordinary way thereby collapsing the diaphragm, cutting the semiconductor wafer, thereafter restoring the diaphragm to the original expanded shape of the semiconductor wafer diaphragm, and removing the individually created die.
申请公布号 US2001049162(A1) 申请公布日期 2001.12.06
申请号 US19990243660 申请日期 1999.02.02
申请人 BROYLES MICHELLE 发明人 BROYLES MICHELLE
分类号 H01L21/00;H01L21/301;H01L21/68;(IPC1-7):B32B3/30 主分类号 H01L21/00
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