发明名称 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
摘要 Circuit (10) has a dual layer gate dielectric (29) formed over a semiconductor substrate (14). The gate dielectric includes an amorphous layer (40) and a monocrystalline layer (42). The monocrystalline layer typically has a higher dielectric constant than the amorphous layer.
申请公布号 WO0193336(A1) 申请公布日期 2001.12.06
申请号 WO2001US13610 申请日期 2001.04.26
申请人 MOTOROLA, INC. 发明人 EISENBEISER, KURT;WANG, JUN;DROOPAD, RAVINDRANATH
分类号 H01L29/78;H01L21/28;H01L29/51 主分类号 H01L29/78
代理机构 代理人
主权项
地址