发明名称 |
Two-dimensional gimbaled scanning actuator with vertical electrostatic comb-drive for actuation and/or sensing |
摘要 |
A two-dimensional scanner consists of a rotatable gimbal structure with vertical electrostatic comb-drive actuators and sensors. The scanner's two axes of rotation may be controlled independently by activating two sets of vertical comb-drive actuators. The first set of vertical comb-drive actuator is positioned in between a outer frame of the gimbal structure and the base, and the second set of vertical comb-drive actuator is positioned in between the inner part of the gimbal structure and the outer frame of the gimbal structure. The inner part of the gimbal structure may include a reflective surface, and the device may be used as a mirror. Furthermore, the capacitance of the vertical comb-drives may be measured to monitor the angular position of the mirror, and the capacitive position-monitoring signal may be used to implement closed-loop feedback control of the mirror angle. The two-dimensional scanner may be fabricated in a semiconductor process. Two-dimensional scanners may be used to produce fiber-optic switches.
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申请公布号 |
US2001048784(A1) |
申请公布日期 |
2001.12.06 |
申请号 |
US20000751660 |
申请日期 |
2000.12.28 |
申请人 |
BEHIN BEHRANG;DANEMAN MICHAEL J.;KIANG MENG-HSIUNG;LAU KAM-YIN;PANNU SATINDERPALL |
发明人 |
BEHIN BEHRANG;DANEMAN MICHAEL J.;KIANG MENG-HSIUNG;LAU KAM-YIN;PANNU SATINDERPALL |
分类号 |
B81B3/00;B81C99/00;G02B6/35;G02B26/08;G02B26/10;H02N1/00;(IPC1-7):G02B6/35 |
主分类号 |
B81B3/00 |
代理机构 |
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