Vertical cavity surface emitting laser diode has metalization layer forming contacting layer on top side, e.g. with annular contact

摘要

The VCSEL has an active layer (2) between a first reflector (3) and a second reflector (4). A contact (7) is provided on a top side for current injection. The contact is a part of an electrically conductive contacting layer, which comprises a part in the form of a contact surface (8) for an electrical connection. The contacting layer is a metalization layer. The contact may be an annular contact which leaves open a region of the top side for the emission of radiation.