发明名称 HIGH-CMOS DEVICE HAVING HIGH-DENSITY RESISTANCE ELEMENTS
摘要 A CMOS device includes a reverse electric conduction type well (2) is formed on a monoelectric conduction type semiconductor substrate (1), a first MOS transistor (3) of a reverse electric conduction type channel is formed on a surface of the semiconductor substrate, and a second MOS transistor (4) of monoelectric conduction type channel is formed on a surface of the well. In the present invention, resistance elements (8R, 7R, 2R) are formed in the semiconductor substrate on a lower side of a thick field oxide film (9) covering a surface of the semiconductor substrate. Further, a second resistance element (11R) composed of a polycrystal silicon layer is formed on an upper side of the field oxide film.
申请公布号 US2001049171(A1) 申请公布日期 2001.12.06
申请号 US19990314011 申请日期 1999.05.19
申请人 ONODERA SHIGEKI 发明人 ONODERA SHIGEKI
分类号 H01L27/08;H01L21/02;H01L27/06;(IPC1-7):H01L21/336 主分类号 H01L27/08
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