发明名称 APPARATUS AND METHOD FOR SPINNING A WORK PIECE
摘要 Apparatus for spinning a work piece includes a work piece platform with a plurality of spaced apart, symmetrically positioned work piece supports arrayed about its periphery. Each of the supports includes a resilient bumper that serves both to support the work piece and as a friction brake to retard slippage of the work piece relative to the platform when the platform and work piece are rotating. Also arrayed about the periphery is a plurality of work piece gripper assemblies configured to center the work piece in contact with the work piece supports. The gripper assemblies include a gripper finger configured to pivot from a non gripping position to a gripping position in response to centrifugal force generated by the rotation of the platform. In the work piece gripping position the gripper finger contacts the edge of the work piece.
申请公布号 WO0193316(A2) 申请公布日期 2001.12.06
申请号 WO2001US18109 申请日期 2001.06.04
申请人 SPEEDFAM-IPEC CORPORATION 发明人 ABRAHAM, RICHARD
分类号 H01L21/687 主分类号 H01L21/687
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