Interferometric position measuring equipment has material measure with transmissive phase grid that functions as diffraction grating

摘要

A material measure (10) is arranged between transmitter (20) and photoelectric receivers (30). The material measure has coded segments (1,2) for diffracting the light beam. The coded segment (1) has transmissive phase grid that functions as a diffraction grating. The phase grid shows light deletion in the zero diffraction order when exposed to light radiation with a wavelength lambda .