发明名称 Wiring structure of semiconductor device
摘要 A method is provided for wiring semiconductor integrated circuits which produces a shielding effect while increasing the wiring area to a small extent. On one side of each of a plurality signal wires, a shielding wire made of the same material and having the same length as the signal wire is provided. The shielding wires are set to the ground potential via aluminum wiring extended from GND pads. Shielding wire segments are separated by cranking points.
申请公布号 US2001048163(A1) 申请公布日期 2001.12.06
申请号 US20010864255 申请日期 2001.05.25
申请人 NEC CORPORATION 发明人 KOHNO TAKAKI
分类号 G06F17/50;H01L21/82;H01L21/822;H01L23/522;H01L23/552;H01L23/58;H01L27/04;(IPC1-7):H01L23/48 主分类号 G06F17/50
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