A PZT system piezoelectric ceramic material including the method of its manufacturing

摘要

A PZT system piezoelectric ceramic material made of the composite oxide as the main constituent and accessories. Composition of the composite oxide is expressed as (Pb(1-(x1)-(x2)-( alpha )((x1)-(x2))), (A1)(x1), (A2)(x2))(((Tiy), (Zrz))(1-( beta )((x1)-(x2))-( psi )), (Y(0.5),Nb(0.5))( psi ))O3, where the sum of x and y is 1, (z/y) is larger than 1.15 and less than 1.30, and ( psi ) is larger than zero and less than 0.1. As for (A1), (A2), (x1), and (x2) they satisfy following three ((i)-(iii)) conditions. Condition (i); where (A1) is at least one element of Ce and La, (A2) is K, (x1) is not less than 0.02 and not greater than 0.08, (x2) is not less than zero and not greater than 0.05, the sum of (x1) and (x2) is not less than 0.02 and not greater than 0.1, (x1) is not greater than (x2), ( alpha ) is 0.5, and ( beta ) is zero, condition (ii); where (A1) is at least oen element of Ce and La, (A2) is K, (x1) is not less than 0.02 and not greater than 0.08, (x2) is not less than zero and not greater than 0.05, the sum of (x1) and (x2) is not less than 0.02 and not greater than 0.1, (x1) is not greater than (x2), ( alpha ) is zero, and ( beta ) is 2.5, and condition (iii); where (A1) is Sr, (A2) is Ba, (x1) is not less than 0.03 and not greater than 0.05, (x2) is not less than 0.03 and not greater than 0.05, absolute value of ((x1)-(x2)) is not greater than 0.01, ( alpha ) is zero, and ( beta ) is zero.