发明名称 |
METHOD AND APPARATUS FOR DETERMINING THE PASS THROUGH FLUX OF MAGNETIC MATERIALS |
摘要 |
The invention includes an apparatus and method for determining the pass through flux of magnetic materials. The apparatus comprises one or more magnetic field sensors arranged in such a way as to collect field strength data in any or all the <i>x, y, z</i> directions. The apparatus also comprises a magnet field source or arrangement of magnet field sources which are placed beneath the material being characterized and includes a mechanism whereby the magnetic material can be mapped by the movement of any one or combination of: magnetic field source or sources, sensors and magnetic material. The invented method comprises the use of various configurations of magnetic sources in order to generate a magnetic field that emulates the open-loop condition found in magnetron sputtering. |
申请公布号 |
WO0192906(A2) |
申请公布日期 |
2001.12.06 |
申请号 |
WO2001US16410 |
申请日期 |
2001.05.21 |
申请人 |
HONEYWELL INTERNATIONAL INC. |
发明人 |
XU, YUN;GUO, WEI;TURNER, STEPHEN, P. |
分类号 |
G01R33/10 |
主分类号 |
G01R33/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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