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发明名称
Verfahren zur Bestimmung der Schichtdicke von Oberflächenschichten
摘要
申请公布号
DE19641815(C2)
申请公布日期
2001.12.06
申请号
DE19961041815
申请日期
1996.10.10
申请人
BUDEI, FRANK
发明人
BUDEI, FRANK
分类号
G01B5/06;G01N3/46;(IPC1-7):G01B11/06;G01B21/08;G01N3/42
主分类号
G01B5/06
代理机构
代理人
主权项
地址
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