发明名称 |
Planarizing anti-reflective coating layer with improved light absorption |
摘要 |
<p>Instead of a single anti-reflective coating layer of medium viscosity employed according to prior art, the present invention discloses providing two anti-reflective coating layers one after the other. The first layer (ARC1) consists of a material of low viscosity and the second layer (ARC2) consists of a material of high viscosity or vice versa, thereby allowing for conformal deposition all over the surface of a semiconductor product as well as for improved planarizing performance at the same time. <IMAGE></p> |
申请公布号 |
EP1160843(A1) |
申请公布日期 |
2001.12.05 |
申请号 |
EP20000111576 |
申请日期 |
2000.05.30 |
申请人 |
INFINEON TECHNOLOGIES SC300 GMBH & CO. KG |
发明人 |
ZIMMERMANN, JENS |
分类号 |
G03F7/09;H01L21/027;H01L23/522;(IPC1-7):H01L21/027 |
主分类号 |
G03F7/09 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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