| 摘要 |
PROBLEM TO BE SOLVED: To provide a film sticking apparatus which can highly accurately stick a film to a substrate even if the film meanders in carrying it. SOLUTION: The film sticking apparatus sticks the film fed from a roll to respective substrates which are sequentially carried on a carry path. The apparatus has a holding means for holding the individual substrate at a desired position on a substrate mount table, a detection means for detecting an end position in a widthwise direction of the film to be stuck to the substrate, and a moving means for moving the substrate on the substrate mount table so that a sticking reference position of the film to the substrate based on end position data detected by the detection means coincides with a film sticking reference position of the substrate.
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