发明名称 Wafer burn-in design for DRAM and FeRAM devices
摘要 In this invention is disclosed a method of burn-in testing either DRAM's or FeRAM's at the wafer level. A stress voltage is applied across all storage capacitors of a DRAM or a FeRAM during a wafer level burn-in test to weed out memory chips with weak memory cells. Three pads are added to the memory chips to accommodate a burn-in signal, a word line voltage and a stress voltage. The burn-in signal disables normal memory operations, powers on all word lines, and connects a stress voltage across the storage capacitors of the memory cells. The stress voltage across the storage capacitors is the difference between the externally applied stress voltage and a low voltage from the bit lines that is connected to the memory cells by means of the word lines. The wafer level burn-in provides a way to improve throughput by eliminating weak product early in the manufacturing process.
申请公布号 US6327682(B1) 申请公布日期 2001.12.04
申请号 US19990274001 申请日期 1999.03.22
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY 发明人 CHIEN PIEN;LEE JIN-YUAN
分类号 G11C29/00;G11C29/50;(IPC1-7):G11C29/00 主分类号 G11C29/00
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