LASER BEAM MACHINING DEVICE AND METHOD OF CORRECTION OF LASER BEAM SPOT POSITION

摘要

PROBLEM TO BE SOLVED: To improve the correction precision of the machining position with laser beam for a laser machining device. SOLUTION: The laser machining device is provided with a position correction mechanism composed of a position confirmation plate for laser beam spot having optical elements arranged in a grid and fixed on a machining table, a position detection part which calculates the position of the laser beam spot on the basis of the beam intensity signal from the optical elements located at the position confirmation plate for laser beam spot, and calculates a deviation quantity from a normal position, and a galvano mirror driving part which drives and controls the galvano mirror on the basis of the signal from the position detection part.