STEAM JETTING NOZZLE AND SUBSTRATE CLEANING DEVICE USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a nozzle generating and jetting steam with a simple structure and a substrate cleaning device using the same. SOLUTION: The steam jetting nozzle 21 is arranged at a prescribed treating position on the upper surface Wa of a substrate rotating around the rotary axis R of the substrate W. The steam jetting nozzle 21 is constituted of a heating means inside the main body part 211 and an accelerating pipe part 212 formed successively to the main body part 211 and having a jetting port 213. Pure water supplied from the liquid introducing pipe 214 is heated and boiled inside the main body part 211 and the steam accelerated at a high speed in the accelerating pipe part 212 is jetted toward the upper surface Wa of the substrate to clean the substrate.