| 摘要 |
PURPOSE:To obtain stable and excellent driving characteristics by providing a slider material having a stable frictional coefficient and wear resistance for a relatively hard opposed material not to damage a vibrator in an ultrasonic motor. CONSTITUTION:An ultrasonic motor comprises a moving body 5 brought into pressure contact with a vibrator 3 for generating a traveling wave by a piezoelectric element 1 through a slider material 4. The material 4 is formed of heat resistant resin composition which contains in mixture 40-95wt.% of heat resistant resin such as polyimide resin, polyphenylene sulfide resin, etc., and 5-60wt.% of spherical graphite having mean particle size of 3-40mum to be obtained by baking resin series spherical particles of phenol resin, naphthalene resin, furan resin, etc., in an inert atmosphere or in vacuum. |
