发明名称 Contact hole of semiconductor and its forming method
摘要 Provided with a contact hole of a semiconductor device and its forming method which is adapted to form double slopes in the insulating layer, with the contact hole including an insulating layer formed on a semiconductor substrate, and a contact hole having double slopes, exposing a defined region of the semiconductor substrate.
申请公布号 US6326312(B1) 申请公布日期 2001.12.04
申请号 US19980204542 申请日期 1998.12.03
申请人 LG SEMICON CO., LTD. 发明人 KIM DONG SEOK
分类号 H01L21/28;H01L21/302;H01L21/3065;H01L21/311;H01L21/768;H01L23/522;(IPC1-7):H01L21/311 主分类号 H01L21/28
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