| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a small-sized and low-priced capacitance-type force detector having high measurement accuracy. SOLUTION: A displacement generating body 120 made of silicone rubber is disposed on a ceramic substrate 110. The generating body 120 is made up of an action part 121, a thin-walled annular flexible part 122, and a fixed part 123 surrounding the flexible part 122, and is fixed onto the substrate 110 by means of a fixing member 140. Electrodes E1 to E5 and insulation layers II to I5 covering them are formed on the substrate 110 while an elastic conductive layer 130 made of a conductive rubber is formed on an under surface of the action part 121. A structure with large number of projections and recesses is formed on an under surface of the conductive layer 130. The structure with projections and recesses is deformed in accordance with a force applied to the action part 121, thereby changing the state of contact with the insulation layers I1 to I5. The direction and size of the acting force are detected based on a change in capacitance between the electrodes E1 to E5 and the conductive layer 130.</p> |
