ELECTRODE FOR GAS LASER, LASER CHAMBER USING IT AND GAS LASER UNIT

摘要

PROBLEM TO BE SOLVED: To provide an electrode for gas laser which can produce laser output stably by suppressing deterioration of the electrode (discharge characteristics). SOLUTION: An anode 3 is coated with a dielectric 4 on the surface of a discharge part 3a in order to suppress deterioration of the electrode. A fluoride, e.g. calcium fluoride or strontium fluoride, is employed as the dielectric 4. A single fluoride is formed compactly as the dielectric 4 with a thickness sufficient for ensuring conductivity without generating erosion of halogen gas at the discharge part 3a of the anode 3 (e.g. 0.005 mm-1.5 mm).